Multi – Resolution
High Precision Stage
Auto Frame LD/ULD
程式介面
Region Planning
Parameter Setting by Region
Defect Type
檢測項目–高功率LED
LED Sapphire AOI
- TDI Line Scan Inspection
- Relative Threshold Method
- Backlight Design，Low Misjudgment
- LED Lamp，Low Running Cost
- Change Production by Recipe
- Specification
–Wafer Size：2”~ 6”
–Resolution：1.4 μm / 2.8μm
–Tact Time：60sec / 2” wafer
